Quasi suppression of higher-order diffractions with inclined rectangular apertures gratings.

Advances in the fundamentals and applications of diffraction gratings have received much attention. However, conventional diffraction gratings often suffer from higher-order diffraction contamination. Here, we introduce a simple and compact single optical element, named inclined rectangular aperture gratings (IRAG), for quasi suppression of higher-order diffractions. We show, both in the visible light and soft x-ray regions, that IRAG can significantly suppress higher-order diffractions with moderate diffraction efficiency. Especially, as no support strut is needed to maintain the free-standing patterns, the IRAG is highly advantageous to the extreme-ultraviolet and soft x-ray regions. The diffraction efficiency of the IRAG and the influences of fabrication constraints are also discussed. The unique quasi-single order diffraction properties of IRAG may open the door to a wide range of photonic applications.